| 摘要 |
A sensor main body (1) is coupled to a plate-shaped diaphragm (2) which oscillates with acoustic waves, and has a plurality of resonance beams (5) which resonate with specific frequencies, respectively. The sensor main body is supported by a supporting section (11), and a cap (12) is provided on the sensor main body (1) for acoustically separating one plane of the diaphragm (2) from the other plane. Thus, a differential pressure between an acoustic pressure applied on the one plane of the diaphragm (2) and that applied on the other plane is increased, and sensitivity is improved.
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