FLEXIBLE TACTILE SENSOR AND FABRICATION METHOD OF THE SAME

摘要

A flexible tactile sensor and a method for manufacturing the same are provided to manufacture a minute tactile sensor having a sufficient flexibility by using a photosensitive polymer and a photolithography technology. A flexible tactile sensor includes a membrane layer(21), a membrane support layer(27), a plurality of metal strain gauges(25), a first metal wire(26a), and a second metal wire(26b). The membrane layer is formed of a photosensitive polymer. The membrane support layer includes at least two photosensitive polymer layers. The metal strain gauges are formed on the lower surface of the membrane layer and are arranged opposite to each other. The first metal wire is formed on the lower surface of the membrane layer so as to be connected the metal strain gauges. The second metal wire is formed between the at least two photosensitive polymer layers so as to be connected to the metal strain gauges.