| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for simply, inexpensively, and highly accurately manufacturing a resin-made micromachine component having a three-dimensional internal structure, a shroud, and a layer structure of three or more layers. <P>SOLUTION: The method include the following steps. (a) A sacrifice layer a is formed on a substrate b. (b) At least two layers of photosensitive resin composition layers c-2, e-2 are laminatedly formed on the sacrifice layer. The internal structure of the target micromachine component is formed to each of the formed photosensitive resin composition layers by the photolithography. (c) A dry film resist f-1 is laminated on the photosensitive resin composition layers in which the internal structure is formed. A shroud layer f-2 is formed by the photolithography. (d) The micromachine component, which has a layered structure of a cured substance layer made of a cured substance of a photosensitive resin composition and the dry film resist layer and is composed of a laminated body with the demarcated peripheral edge part, is separated from the substrate b by removing the sacrifice layer. <P>COPYRIGHT: (C)2007,JPO&INPIT |
