| 摘要 |
PROBLEM TO BE SOLVED: To provide an epoch-making mask for forming an organic film superior in practicality capable of forming a superior sealing film free from defect, and to provide a sealing film forming device, and a forming method of the sealing film. SOLUTION: As for an opening shape of an opening part 7 when an organic material is injected and an organic film 3 is covered on an organic EL element 1 on a substrate 2, an opening diameter of an opening part 7A on a mask rear face side end to become a side polymerized on the substrate 2 and an opening diameter of a mask surface side end opening part 7B are not made to be the same opening diameter, and the opening shape is formed so that the opening diameter of the end opening part 7A of the mask rear face side will be larger than that of the opening part 7B of the mask surface side end. Separability of the opening part 7A of this mask rear face side end from the organic EL element 1 is set so that the opening part 7A of this mask rear face side end and the organic film 3 covering the organic EL element 1 on the substrate 2 do not contact with each other. COPYRIGHT: (C)2007,JPO&INPIT
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