TEMPERATURE MEASURING DEVICE, THERMAL TREATMENT DEVICE USING THE SAME, TEMPERATURE MEASURING METHOD

摘要

There are provided a temperature measuring device, method, and a thermal treatment device which are appropriately used for measuring a temperature of a substrate subjected to thermal treatment performing rapid heating. The temperature measuring device includes: a light intensity measuring unit for applying a laser beam to an object to be heated having a uniquely defined correlation between a temperature and a refractivity and measuring light intensity characteristic X indicating the relationship between a reflected light or a transmitting light obtained by interference of laser beams multiply reflected in the object to be heated and the time; a calculation unit for acquiring a reproduced object to be heated for obtaining a virtual object to be heated having light intensity characteristic Z nearest to the light intensity characteristic X obtained from the virtual object to be heated when applying a thermal load equivalent to the condition of heading the object to be heated and applying a laser beam having characteristic equivalent to the aforementioned leaser beam to the virtual object to be heated; and a temperature output unit for obtaining a temperature of a predetermined portion of the object to be heated at a predetermined time according to the reproduced object to be heated.