发明名称 METHOD FOR CONTROLLING LIGHT INTENSITY DISTRIBUTION OF LUMINOUS FLUX, OPTICAL INTEGRATOR, AND METHOD FOR MANUFACTURING OPTICAL INTEGRATOR
摘要 <P>PROBLEM TO BE SOLVED: To protect an optical integrator from scratches or contamination and to suppress changes in the optical performance of the optical integrator. <P>SOLUTION: The optical integrator 175 is used, comprising a thin long optical integrator body 176 having a predetermined cross-sectional form which passes an incident luminous flux while totally reflecting the flux to exit and a clad portion 177 tightly disposed in an annular form to the side face of the optical integrator body 176, wherein the luminous energy distribution of a luminous flux Ke entering the integrator body 176 is uniformized, the cross-sectional form of the luminous flux Ke is shaped into a predetermined form, and the flux Ke is made to exit from the integrator 175. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007004012(A) 申请公布日期 2007.01.11
申请号 JP20050186455 申请日期 2005.06.27
申请人 FUJIFILM HOLDINGS CORP 发明人 KOMORI KAZUKI;OKAZAKI YOJI;ISHIKAWA HIROMI;OMORI TOSHIHIKO
分类号 G03F7/20;C03B37/027;G02B6/00;G02B6/02;H01L21/027 主分类号 G03F7/20
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