| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam device with which a laser beam which hardly generates defective machining is created. <P>SOLUTION: The laser beam device 10 comprises a light source 11 including a laser beam array stack 12. The laser beams 32b, 32c are deflected with a prism 14 and come to have optical axes inclined to the optical axes of the laser beams 32a. These laser beams have delay-axis directions parallel to each other. With a condensing optical system 20, these laser beams are condensed in separated positions Pa-Pc along the axes perpendicular to the delay-axes. In this way, the laser beam 34 having a top-hat-shaped intensity profile 77 along the direction perpendicular to the direction of the delay-axis is obtained. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
