| 摘要 |
PROBLEM TO BE SOLVED: To provide a purge system capable of preventing the occurrence of a pressure difference between the interior and exterior of an FOUP during a purge operation of the interior of the FOUP. SOLUTION: A communication path for communicating the exterior of the FOUP and the interior of a discharge path is provided to the discharge path that extends from a stage side discharge port provided on a stage on which the FOUP is placed. Thus, an external atmosphere is introduced into the discharge path through the communication path when the pressure difference begins to occur between the interior and exterior of the FOUP. COPYRIGHT: (C)2007,JPO&INPIT
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