摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acoustic resonator of high quality coefficient suppressing dispersion of resonance energy to the outside of the resonator. <P>SOLUTION: In an acoustic resonator that includes a substrate, a first electrode adjacent the substrate and having an outer perimeter, a layer of piezoelectric material adjacent the first electrode, and a second electrode adjacent the layer of piezoelectric material and having an outer perimeter, around either the first electrode or the second electrode, a frame region or frame is formed by alternating regions of different acoustic impedance. For example, a protruding or rushing-in portion is formed in an electrode by lifting-off. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |