发明名称 ACOUSTIC RESONATOR PERFORMANCE ENHANCEMENT USING ALTERNATING FRAME STRUCTURE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an acoustic resonator of high quality coefficient suppressing dispersion of resonance energy to the outside of the resonator. <P>SOLUTION: In an acoustic resonator that includes a substrate, a first electrode adjacent the substrate and having an outer perimeter, a layer of piezoelectric material adjacent the first electrode, and a second electrode adjacent the layer of piezoelectric material and having an outer perimeter, around either the first electrode or the second electrode, a frame region or frame is formed by alternating regions of different acoustic impedance. For example, a protruding or rushing-in portion is formed in an electrode by lifting-off. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007006501(A) 申请公布日期 2007.01.11
申请号 JP20060173458 申请日期 2006.06.23
申请人 AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE LTD 发明人 RUBY RICHARD C;FAZZIO RONALD S;FENG HONGJUN;BRADLEY PAUL D
分类号 H03H9/17;H01L41/09;H01L41/187;H01L41/22;H03H3/02 主分类号 H03H9/17
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