| 摘要 |
PROBLEM TO BE SOLVED: To provide a coated member having improved adhesiveness between a substrate and a coated film, and improved lubrication characteristics, by inhibiting particulates containing Si from depositing on a member to be coated. SOLUTION: The coated member has a film which is made from a compound containing Si as a metal atom and is coated with a physical vapor deposition technique. The Si-containing particulates with diameters of 0.1μm or larger deposited on the surface of the film are controlled to occupy 5% or less of 1,000μm<SP>2</SP>by an area rate on an arbitrarily selected surface of the film; and are controlled to be less than 100 pieces by the number in an area of 1,000μm<SP>2</SP>on the arbitrarily selected surface of the film. COPYRIGHT: (C)2007,JPO&INPIT
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