| 摘要 |
<p>PROBLEM TO BE SOLVED: To permanently use a detoxifying apparatus by achieving detoxification reducing PFC to a predetermined concn. or less and suppressing high temp. corrosion caused by F2 (or fluorine compd.) formed as a byproduct. SOLUTION: A detoxifying apparatus is constituted of an inlet scrubber 8, a heating reaction part 2, an outlet scrubber 9 and a receiving tank 3 and the heating reaction part 2 is constituted of a cylindrical body part 6, a scrubbing gas introducing pipe 12 and a heater 5. The inner peripheral surface of the body part 6, the outer peripheral surface of the heater 5 and at least the outer peripheral surface in the heating reaction part of a scrubbing exhaust gas introducing pipe 12 comprise ceramics. The surface temp. of the heater 5 is held to 800-1,400 deg.C at a time of the thermal decomposition of a water- insoluble heat-decomposable gas and a heating element is composed of a metal material such as Pt, Mo or the like or a nonmetal material such as SiC or the like and inserted into an impermeable ceramic tube based on Al2 O3 .</p> |
