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发明名称
SUPER TRENCH MOSFET INCLUDING BURIED SOURCE ELECTRODE AND METHOD OF FABRICATING THE SAME
摘要
申请公布号
EP1741140(A2)
申请公布日期
2007.01.10
申请号
EP20050739780
申请日期
2005.04.26
申请人
SILICONIX INCORPORATED
发明人
PATTANAYAK, DEVA, N.;BAI, YUMING;TERRILL, KYLE;YUE, CHRISTIANA;XU, ROBERT;LUI, KAM, HONG;CHEN, KUO-IN;SHI, SHARON
分类号
H01L29/78;H01L21/336;H01L29/06;H01L29/40;H01L29/417;H01L29/423
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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