| 摘要 |
A booster system for semiconductor device manufacturing equipment is provided to prevent the generation of side effects by checking previously an abnormal pressure of the air using a sensor and a controller. A booster system for semiconductor device manufacturing equipment includes a valve(240) for controlling an air inlet line, a booster pump, a sensor and a controller. The booster pump(210,220) is used for being supplied with the air through the air inlet line, generating a pressurized air and supplying the pressurized air to the semiconductor device manufacturing equipment. The sensor(310,320) is attached to the booster pump. The controller(330) is used for controlling the operation of the valve according to a predetermined signal detected by the sensor.
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