| 摘要 |
PROBLEM TO BE SOLVED: To reliably remove a foreign matter and to prevent static electricity when rubbing is performed. SOLUTION: A humidified air blower 85 is disposed at an upper and rear side of a rubbing roll 83 and a suction device 87 is disposed at a back end of a rubbing stage 81. A flow 86 is formed by the humidified air from the humidified air blower 85 and the flow 86 of humidified air is stabilized by the suction device 87. The foreign matter caused when rubbing is performed is carried by the flow 86 of the humidified air passing through the near parts of the surface of the rubbing roll 83 and the surface of a substrate 82 and reliably sucked and excluded via a suction port 88 of the suction device 87. Since the humidified air passes through the surface of the substrate 82, the occurrence of static electricity is prevented. |
