发明名称 BRUSH WETTING APPARATUS
摘要 A brush wetting apparatus is provided to shorten an interval of brush replacement time while greatly reducing time loss generated by direct wetting of a conventional scrubber cleaning apparatus by including a brush wetting apparatus capable of performing a wetting process on a brush in advance. A receptacle(110) is prepared whose upper part is open. A cover(120) opens/shuts the receptacle, capable of being separated from the open upper part of the receptacle. The cover is equipped with at least one driving unit(130) on which a brush(10) is mounted wherein the brush is rotated by the at least one driving unit. At least one nozzle(140) injects fluid to the brush rotating in the receptacle, mounted on the receptacle. Fluid is supplied to the nozzle by a fluid supply line. A valve can control the flowrate of the fluid, installed in the fluid supply line.
申请公布号 KR20070005803(A) 申请公布日期 2007.01.10
申请号 KR20050060821 申请日期 2005.07.06
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, SAM SOO
分类号 H01L21/304 主分类号 H01L21/304
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