发明名称 |
Polishing apparatus |
摘要 |
A multi-head type polishing apparatus has a plurality of top rings for holding workpieces with respect to a single polishing table. A polishing apparatus includes a polishing table having a polishing surface, a plurality of top rings for holding workpieces and pressing the workpieces against the polishing surface, and a carousel for supporting the top rings and indexing the top rings. The polishing apparatus further includes a rotary transporter disposed in a position which can be accessed by the top rings and having a plurality of portions positioned on a predetermined circumference from a center of rotation of the rotary transporter for holding the workpieces, and a pusher for transferring the workpieces between the rotary transporter and the top rings. |
申请公布号 |
EP1155778(B1) |
申请公布日期 |
2007.01.10 |
申请号 |
EP20010111685 |
申请日期 |
2001.05.14 |
申请人 |
EBARA CORPORATION |
发明人 |
KATSUOKA, SEIJI;SEKIMOTO, MASAHIKO;MIYAZAKI, MITSURU;NOJI, NAOKI;CHIBA, KAZUKI;FUJIMOTO, KENJI |
分类号 |
B24B7/17;B24B37/04;B24B37/32;H01L21/00;H01L21/304;H01L21/677;H01L21/687 |
主分类号 |
B24B7/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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