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发明名称
METHOD FOR PRODUCING A WAVEGUIDE STRUCTURE IN A SURFACE-EMITTING SEMICONDUCTOR LASER AND SURFACE-EMITTING SEMICONDUCTOR LASER
摘要
申请公布号
EP1590865(B1)
申请公布日期
2007.01.10
申请号
EP20030789059
申请日期
2003.11.19
申请人
VERTILAS GMBH
发明人
AMANN, MARKUS, CHRISTIAN
分类号
H01S5/183;H01S5/343
主分类号
H01S5/183
代理机构
代理人
主权项
地址
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