APPARATUS FOR DEPOSITING THE ORGANIC THIN FILM

摘要

An apparatus for depositing an organic thin film is provided to improve yield by performing a continuous deposition process of supplying an organic thin film deposition material of solid powder and evaporating the material and injecting the material to a substrate. A substrate(120) and a mask(130) are arranged in a chamber(100). A supply unit(200) is arranged outside the chamber, and supplies an organic thin film deposition material of solid powder. An injection unit(140) evaporates the organic thin film deposition material supplied from the supply unit and then injects the organic thin film deposition material to the substrate. The injection unit includes a heating unit for heating the organic thin film material of solid powder, and an injection unit for injecting the evaporated organic thin film material to the substrate.