SEMICONDUCTOR FABRICATION APPARATUSES HAVING PRESSURE-CHANGE-PREVENTION-MEAN IN ORDER TO PROTECT PRESSURE IN PROCESS TUBE

摘要

Semiconductor manufacture equipments having pressure change prevention units for protecting pressure in a process tube are provided to protect a semiconductor substrate during a deposition process by using a pressure sensor and an external pressure blocking valve. A process tube(20) and an exhaust pumping unit(110) are arranged on semiconductor manufacturing equipment. A tube pressure controller(65) is arranged between the process tube and the exhaust pumping unit. A pressure sensor(80) and an external pressure blocking valve(85) are arranged between the tube pressure controller and the exhaust pumping unit. The external blocking valve and the pressure sensor are electrically connected to control the pressure in the process tube together with the tube pressure controller. The tube pressure and the external pressure blocking valve are independently operated at a predetermined time interval.