INERTIAL SENSOR WITH REDUCED ERROR CURRENTS DUE TO REDUCED WIDTH AND DISTANCE OF CONDUCTORS IN CRITICAL ZONES

摘要

The sensor has a piezoelectric plate in which a vibrating unit is delimited, where the unit carries excitation electrodes connected to an excitation circuit comprising conductor tracks (11) carried by the plate. The excitation circuit has a disturbing circuit portion (13) in which the conductor tracks (11) extend on both sides of a median plane (M) of a part (6) of the plate subjected to deformations when the sensor is subjected to an acceleration. The conductor tracks in the portion (13) comprise a width (l) of 10 micrometers and are spaced at a distance (d) of 40 micrometers.