Control method, temperature control method, adjustment method, temperature controller, program, recording medium and heat treatment device

摘要

When a work (1) is set on a hot plate (2) and a heat treatment is started and the like, an addition waveform of a target temperature is formed based on a previously formed data of an adjustment value, and a temperature is controlled by adding the addition waveform to the target temperature SP, and with the data of the adjustment value, the variation in temperature of the work (1) is prevented using an interference matrix (A) showing a relation between the target temperature SP and the temperature of the work (1).