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发明名称
Acoustic sensor with resonator cell for in-line continuous monitoring of gasses
摘要
申请公布号
EP0813060(B1)
申请公布日期
2007.01.10
申请号
EP19970109581
申请日期
1997.06.12
申请人
LEYBOLD INFICON, INC.
发明人
WAJID, ABDUL;HURD, CLARENCE;HETZEL, MELVIN C.
分类号
G01N29/02;G01N29/09;G01N29/00;G01N29/036;G01N29/22
主分类号
G01N29/02
代理机构
代理人
主权项
地址
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