发明名称 EXPOSURE APPARATUS
摘要 <p>An alignment exposure apparatus is provided to prevent waste of time upon replacing a halogen lamp by using a timer. A light source unit(110) has plural light sources(112,114). A driving unit(118) moves the respective light sources all directions. A timer(116) displays use time of the light source in use out of the light sources. A controlling unit(119) receives a signal from the timer. The controlling unit drives the driving unit to replace the using light source into a non-using light source when a pre-set time is on. The driving unit is connected to the controlling unit to be controlled. The controlling unit is connected to the timer. The controlling unit drives the driving unit based on usage information about time received from the timer.</p>
申请公布号 KR20070005820(A) 申请公布日期 2007.01.10
申请号 KR20050060845 申请日期 2005.07.06
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JANG, HAG SU
分类号 H01L21/027 主分类号 H01L21/027
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