| 摘要 |
Semiconductor device manufacturing equipment is provided to improve process stability by using a transfer robot arm that moves in a cassette. A cassette(210) is provided with a slot on which a plurality of wafers are mounted. A transfer robot arm(240) enters into the cassette to transfer the wafers. Sensors(262,264) detect a position of the respective wafers. The sensors utilize an LED(Light Emitting Diode) light or laser light. A controller controls a position of the cassette using the detection results of the sensors with respect to the wafers in order to make the transfer robot arm transfer the wafers.
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