Apparatus and method for holding and transporting thin opaque plates

摘要

A device is disclosed for supporting semiconductor wafers or other polished, opaque plates (100) for processing or metrology in a vertical orientation, where the wafer loading and unloading occurs in a horizontal orientation. The device consists of a pallet frame (30) designed with an opening (32) such that both sides of the wafer are exposed. The wafer is loaded into the pallet to rest on three fixed rest members (98) extending a short distance into the opening. Moving clamp members (90) on the pallet (30) are located for movement toward or away from the corresponding rest members. Two cylindrical rest pins (92) are located on axes parallel to the central axis of the opening to permit the wafer to rest under the force of gravity on the rest pins when the pallet (30) is rotated to its vertical position. Provisions (60) are made to minimize the effects of mechanical vibration of the wafer (100) while insuring a robust physical restraint of the wafer within the apparatus without inducing mechanical stresses which could influence the shape of the wafer (100).