发明名称 |
SHEET PEELING APPARATUS AND PEELING METHOD |
摘要 |
<p>A peeling apparatus 10 includes a peeling table 11 supporting a wafer W on which a sheet S is stuck and a sheet peeling unit 12 disposed above the peeling table 11, in which sheet S can be peeled off with relative movement of the sheet peeling unit 12 and the peeling table 11. The peeling apparatus 10 includes a support roll 20 of peeling tape PT, first and second rolls 30, 31 bonding the peeling tape PT to the sheet S surface, and a winding roll 21 of the peeling tape PT. Peeling-off is performed in a state of forming an initial peeling angle a1 such that a peeling tape PT is folded in an aperture C formed between the second roll 31 and the sheet S, and afterwards the sheet S is peeled off at subsequent peeling angle a2 corresponding to a diameter of the second roll 31.</p> |
申请公布号 |
EP1742255(A1) |
申请公布日期 |
2007.01.10 |
申请号 |
EP20050737251 |
申请日期 |
2005.04.27 |
申请人 |
LINTEC CORPORATION |
发明人 |
TSUJIMOTO, MASAKI;YOSHIOKA, TAKAHISA;KOBAYASHI, KENJI |
分类号 |
H01L21/00;B29C63/00;H01L21/304;H01L21/68 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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