发明名称 |
Electron emission thin-film, plasma display panel comprising it and method of manufacturing them |
摘要 |
An electron emission thin-film with improved secondary electron emission characteristics compared with conventional ones, a plasma display panel including the electron emission thin-film, and their manufacturing methods. Using a vacuum deposition system, a protective layer that is an MgO thin-film is formed on a dielectric layer formed on a front glass substrate. At the time of deposition, angles that lines linking the central point of a target material for the protective layer respectively with the central point and both ends points of the front glass substrate form with the front glass substrate are exclusively in a range of 30 to 80 °. This enables at least some of MgO columnar crystals constituting the protective layer to have flat planes that are inclined with respect to the surface of the thinfilm.
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申请公布号 |
US7161297(B2) |
申请公布日期 |
2007.01.09 |
申请号 |
US20030275795 |
申请日期 |
2003.06.02 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
KOTERA KOICHI;OOE YOSHINAO;KONO HIROKI;TANAKA HIROYOSI |
分类号 |
H01J1/14;H01J1/316;H01J9/12;H01J9/14;H01J17/04 |
主分类号 |
H01J1/14 |
代理机构 |
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主权项 |
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地址 |
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