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发明名称
PLASMA PROCESS EQUIPMENT
摘要
申请公布号
KR100665839(B1)
申请公布日期
2007.01.09
申请号
KR20040101065
申请日期
2004.12.03
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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