发明名称 Method of forming polysilicon layers in non-volatile memory
摘要 In accordance with an embodiment of the present invention, a semiconductor structure includes an undoped polysilicon layer, a doped polysilicon layer in contact with the undoped polysilicon layer, and an insulating layer in contact with the undoped polysilicon layer. The undoped polysilicon layer is sandwiched between the doped polysilicon layer and the insulating layer.
申请公布号 US7160774(B2) 申请公布日期 2007.01.09
申请号 US20040870285 申请日期 2004.06.16
申请人 发明人
分类号 H01L21/336;H01L21/28;H01L29/423;H01L29/788 主分类号 H01L21/336
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