| 摘要 |
A vacuum pump of the invention comprises, in a common pump body ( 100 ): molecular drag pump stages ( 5 ) in series with regenerative pump stages ( 9 ). The molecular drag pump stages ( 5 ) comprise a molecular drag rotor ( 5 a) including a blind axial cavity ( 5 c) open towards the downstream end, and the motor ( 7 ) is housed at least in part in said blind axial cavity ( 5 c). The drive shaft ( 8 ) is coupled via its upstream end ( 8 a) to the molecular drag rotor ( 5 a), and it is coupled via its downstream portion ( 8 b) to the regenerative rotor ( 9 a). The motor ( 7 ) is secured to the central segment of the drive shaft ( 8 ). This provides a universal pump of small size, enabling pumping to be performed from 1000 mbar down to 10<SUP>-8 </SUP>mbar, and suitable for being placed in the vicinity of a vacuum chamber.
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