| 摘要 |
The problem is to prevent a metal needle from damaging a substrate in mechanical patterning. A thin film is formed of a substrate (2), a back-face electrode layer (3), and a multinary compound semiconductor thin film (light-absorption layer) (5), a transparent high-resistance buffer layer (6), and a transparent conductive window layer (7) layered in this order. The thin film is split into unit cells. The cells are connected in series to generate a predetermined voltage. There are three patterning: a patterning (P1) for splitting the back-surface electrode layer (3); a patterning (P2) for splitting the light absorption layer (5) alone or both the absorption layer and the buffer layer (6); and a patterning (P3) for splitting the window layer (7) through to the light absorption layer (5). When, in the patternings (P2, P3), a groove is formed by mechanically removing each constituent thin-film layer with the use of a metal needle, an ultrathin- film layer (4) is secondarily produced on the surface of the back-face electrode layer (3) by the reaction with chalcogen in a light-absorption layer formation step. This ultrathin-film layer is used as a solid lubricant. ® KIPO & WIPO 2007 |
