发明名称 |
System and method for holographic fabrication and replication of diffractive optical elements for maskless lithography |
摘要 |
A method is disclosed for forming an array of focusing elements for use in a lithography system. In accordance with an embodiment, the method includes the steps of providing a master element that includes at least one diffractive pattern at a first location with respect to a target surface, illuminating the master element to produce a first diffractive pattern on the target surface at the first location, moving the master element with respect to the target surface to a second location with respect to the target surface, and illuminating the master element to produce a second diffractive pattern on the target surface at the second location.
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申请公布号 |
US7160673(B2) |
申请公布日期 |
2007.01.09 |
申请号 |
US20030677804 |
申请日期 |
2003.10.02 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
MENON RAJESH;GIL DARIO;CARTER DAVID J.;BARBASTATHIS GEORGE;SMITH HENRY I. |
分类号 |
G02B3/08;G03F1/00;G03F7/00;G03F7/075;G03F7/20;G03H1/00;G21G5/00 |
主分类号 |
G02B3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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