| 摘要 |
<p>An electron beam drift correction method and an electron beam writing method are provided to reduce the number of drift correcting processes in spite of the turbulence. Period is changed and a beam drift of an electron beam is firstly corrected at each elapse of the period(S102 to S112). The beam drift of the electron beam is additionally corrected in case of the variation of values of predetermined turbulence elements regardless of the first beam drift correcting process(S202 to S210). At least one or more selected from a group consisting of an outer pressure value, a temperature value, a magnetic value, a flow rate of cooling water and a voltage value of a power source are used as the values of the predetermined turbulence elements.</p> |
