发明名称 |
Method for employing vertical acid transport for lithographic imaging applications |
摘要 |
The present invention provides methods for forming images in positive- or negative-tone chemically amplified photoresists. The methods of the present invention rely on the vertical up-diffusion of photoacid generated by patternwise imaging of an underlayer disposed on a substrate and overcoated with a polymer containing acid labile functionality. In accordance with the present invention, the vertical up-diffusion can be the sole mechanism for imaging formation or the methods of the present invention can be used in conjunction with conventional imaging processes.
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申请公布号 |
US7160665(B2) |
申请公布日期 |
2007.01.09 |
申请号 |
US20020334219 |
申请日期 |
2002.12.30 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LARSON CARL ERIC;WALLRAFF GREGORY MICHAEL |
分类号 |
G03F7/38;G03F7/004;G03F7/038;G03F7/039;G03F7/09;G03F7/095;G03F7/30;H01L21/027 |
主分类号 |
G03F7/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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