发明名称 Method of forming carbon nanotube emitters and field emission display (FED) including such emitters
摘要 A method of forming carbon nanotube emitters and a method of manufacturing an FED using such carbon nanotube emitters includes: forming a carbon nanotube layer on a substrate on which a plurality of electrodes are formed, coating a photoresist on the carbon nanotube layer, patterning the photoresist such that the photoresist only remains above the electrodes, removing an exposed portion of the carbon nanotube layer by etching using the patterned photoresist as a etch mask, and removing the photoresist pattern and forming the carbon nanotube emitters on the electrodes.
申请公布号 US7160169(B2) 申请公布日期 2007.01.09
申请号 US20040979139 申请日期 2004.11.03
申请人 SAMSUNG SDI CO., LTD. 发明人 PARK SHANG-HYEUN
分类号 H01J9/02;H01J9/04;B05D5/12;H01J1/30;H01J9/12;H01J31/12 主分类号 H01J9/02
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