| 摘要 |
A cassette lifting apparatus of a loadlock chamber is provided to prevent the corrosion of an elevator and to restrain the contamination of a wafer by covering the elevator using a cap and keeping the inside of the cap in a vacuum state. A cassette lifting apparatus is installed at a bottom portion of a loadlock chamber(10) in order to lift a cassette with a plurality of wafers. The cassette lifting apparatus includes an elevator, a cap, and a vacuum line. The elevator(20) is moved up and down in the loadlock chamber by a cylinder. The cap(50) is used for blocking the elevator from the outside. The vacuum line(60) is connected with the cap in order to keep the inside of the cap in a vacuum state.
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