发明名称 APPARATUS FOR DEPOSITING METAL
摘要 A metal depositing apparatus is provided to reduce time and cost required in a process by integrating deposition and pattern forming processes. When an inert-gas ion is incident, a target(2) discharges a metal particle(6) to be deposited on a glass substrate(8). The metal particle discharged from the target is attached on the glass substrate such that a conductive layer is formed thereon. An element induce apparatus(20) is installed on a lower surface of the glass substrate. A certain patterned conductor is formed on a surface of the molecular inducing apparatus. A power supplying unit applies predetermined power to the conductor of the molecular inducing apparatus. The pattern formed on the molecular inducing apparatus is the same pattern as a conductive pattern formed on the glass substrate.
申请公布号 KR20070002128(A) 申请公布日期 2007.01.05
申请号 KR20050057455 申请日期 2005.06.30
申请人 LG.PHILIPS LCD CO., LTD. 发明人 NAM, YEONG SOO
分类号 H01L21/203 主分类号 H01L21/203
代理机构 代理人
主权项
地址