METHOD AND APPARATUS OF FABRICATING LIQUID CRYSTAL DISPLAY

摘要

A method and an apparatus for manufacturing an LCD is provided to improve efficiency of a lift-off process by forming a plurality of stripper penetration paths in a sacrificial layer through a heat treatment process using a difference in a thermal expansion coefficient between a photoresist pattern and the sacrificial layer. A first thin film is formed on a substrate. A photoresist pattern(152) is formed on the first thin film. The first thin film is etched. A second thin film is formed on the substrate including the photoresist pattern. A plurality of stripper penetration paths are formed in the second thin film by a difference in a thermal expansion coefficient between the photoresist pattern and the second thin film through a heat treatment process. The photoresist pattern and the second thin film thereon are removed by a stripper penetrating through the stripper penetration paths.