METHOD OF FORMING FINE PATTERN, LIQUID CRYSTAL DISPLAY USING THE SAME, AND FABRICATING METHOD THEREOF

摘要

A fine pattern forming method, an LCD using the same, and a manufacturing method thereof are provided to form a fine pattern of a smaller line width than an exposure resolution by an ashing process of a photoresist pattern and to improve line-width uniformity of the fine pattern by forming the photoresist pattern with a step difference. A photoresist pattern(54) is formed on a thin film(52). The photoresist pattern is ashed. The thin film is patterned by using the ashed photoresist pattern as a mask(60) to form a fine pattern. A photoresist pattern including a first line width is formed on the thin film, corresponding to an exposure resolution. The photoresist pattern is ashed. The thin film is patterned using the ashed photoresist pattern as a mask to form a smaller fine pattern than the first line width.