| 摘要 |
A mask alignment apparatus for preventing failure of mask alignment is provided to correctly define alignment area of a mask without poor positioning, and improve reduced yield of the mask by fabricating a floating unit so as to make the mask to be coincident with contact face of a stator and to locate the apparatus in the center of lateral sides of the mask. The mask alignment comprises: a stator(150) to be in contact with a mask(120); a floating unit which moves and rotates the stator to derive the mask to be coincident with contact face of the stator; and a cylinder part(160) which pushes the stator in the mask direction to align the mask in its position. The floating unit has first and second bearings to move and rotate the stator. The cylinder part has an air cylinder moving by air pressure and a floating joint so as to prevent friction caused by flowing of the air cylinder. The floating unit moves and rotates to induce the stator to be coincident with the contact face of the mask.
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