| 摘要 |
A cleaning apparatus for manufacturing an LCD is provided to effectively remove a pollutant from a substrate during cleaning of the substrate, thereby preventing the erosion and breakage of wires, by conveying the substrate in a tilting state. A loader part is configured to load a substrate(302). A stream line includes a substrate conveying unit, a first pipe line(310), and a second pipe line(320). The substrate conveying unit receives the substrate from the loader, and conveys the substrate with tilting the substrate. The first pipe line is formed in a direction perpendicular to an advancing direction of the substrate. The second pipe line is formed in the advancing direction of the substrate. A cleaning line cleans the substrate conveyed from the strip line. |
