发明名称 WAFER TEST APPARATUS AND METHOD USING THE SAME
摘要 A wafer test apparatus and a method using the same are provided to modify easily a test program and to reduce a test time by using a BIST(Built In Self Test) logic. A wafer test apparatus includes a probe station. The probe station includes a probe card. The probe card includes a plurality of BIST logics. The number of BIST logics formed in the probe card is in a range of 8 to 12. The 8 to 12 BIST logics are used for testing sequentially a plurality of chips, so that the size of the wafer test apparatus itself is reduced and a wafer test time is remarkably decreased.
申请公布号 KR20070002663(A) 申请公布日期 2007.01.05
申请号 KR20050058283 申请日期 2005.06.30
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 PARK, SUNG KUN
分类号 H01L21/66 主分类号 H01L21/66
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