A FAN FILTER UNIT FOR APPARATUS FOR FABRICATING SEMICONDUCTOR

摘要

A fan filter unit for semiconductor equipment is provided to enhance sealing capability by filling a semi-solid type adhesive in an upper filling portion of a filter and inserting a vertical end portion of a case into the upper filling portion of the filter. A fan filter unit for semiconductor equipment includes a lower cover, a filter, a case, and an upper cover. The lower cover(10) includes an upper opening portion and a storing space. The filter(20) is stored in the lower cover. The filter includes a filling portion with a filling groove. The filling groove is filled with a semi-solid type adhesive. The case(30) is inserted into the filling groove through both lower end portions. The upper cover(40) is installed on the case. The upper cover includes a fan(80).