| 摘要 |
An apparatus of measuring a thickness of a depo shield is provided to a fine gap from occurring between an outer periphery of a baffle plate and the depo shield by using a vernier caliper. An apparatus of measuring a thickness of a depo shield includes a first cap-shaped jig which is capped on a first measuring portion(C1) of a vernier caliper to come into contact with an inner periphery of a depo shield, when measuring a thickness, and a second cap-shaped jig which is capped on a second measuring portion(C2) of the vernier caliper to come into contact with an outer periphery of the depo shield, when measuring the thickness. An interval between the inner periphery and outer periphery of the depo shield is measured.
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