| 摘要 |
<p>A bit of semiconductor manufacturing equipment of a multilayer structure and a method for processing the same are provided to improve efficiency and productivity of equipment by optimizing scheduling in real time. Semiconductor manufacturing equipment(100) includes an indexer, at least one local equipment of a multilayer structure, and a control unit. The indexer(104) includes a plurality of ports. The local equipment includes a plurality of processing units. The local equipment is used for receiving simultaneously a plurality of wafers from the indexer and performing predetermined processes on the wafer. The control unit(102) controls the indexer, so that the indexer is capable of supplying simultaneously the plurality of wafers to the local equipment.</p> |
