| 发明名称 |
FLUORINATED SULFONAMIDE SURFACTANTS FOR AQUEOUS CLEANING SOLUTIONS |
| 摘要 |
Described are anionic N-substituted fluorinated sulfonamide surfactants, and use thereof in cleaning and in acid etch solutions. The cleaning and etch solutions are used with a wide variety of substrates, for example, in the cleaning and etching of silicon oxide-containing substrates. ® KIPO & WIPO 2007
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| 申请公布号 |
KR20070004022(A) |
申请公布日期 |
2007.01.05 |
| 申请号 |
KR20067020667 |
申请日期 |
2005.02.01 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
SAVU PATRICIA M.;LAMANNA WILLIAM M.;PARENT MICHAEL J. |
| 分类号 |
C11D11/00;C11D1/00;C11D3/02;C11D3/39 |
主分类号 |
C11D11/00 |
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