STRUCTURE AND MANUFACTURING METHOD OF ANTI-ADHESIVE HYBRID MASK AND NANO IMPRINTING METHOD THEREBY

摘要

A structure of a stamp having an adhesion preventing layer, a manufacturing method thereof, and a nano pattern imprinting method using the same are provided to prevent an adhesion of a partial imprinting layer to a stamp by forming the adhesion preventing layer on a surface of the stamp. A nano-sized pattern is formed on a transparent substrate(11). An opaque metal layer(13) is formed corresponding to a partial surface of the transparent substrate. A first thin film layer(14) is formed on the surface of the opaque metal layer to reduce at least one of surface energy and friction coefficient. A second thin film layer(15) is formed on the first thin film layer to increase hydrophobicity. A buffer layer is formed between the opaque metal layer and the first thin film to increase adhesive strength.