发明名称 Method of forming fine pattern, liquid crystal display device having a fine pattern and fabricating method thereof
摘要 A method of forming fine pattern includes providing a film, forming a photo-resist pattern on the film, ashing the photo-resist pattern and patterning the film by using the ashed photo-resist pattern as a mask.
申请公布号 US2007001961(A1) 申请公布日期 2007.01.04
申请号 US20060451482 申请日期 2006.06.13
申请人 LG.PHILIPS LCD CO., LTD. 发明人 YOO SOON S.;CHO HEUNG L.
分类号 G09G3/36 主分类号 G09G3/36
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