| 摘要 |
An apparatus for inspecting a surface, and a method for inspecting a surface by using the same are provided to perfectly detect all alien substances placed on a top side or a bottom side of a substrate, inspect a bad substrate having protrusions on a surface, and simplify inner construction. An optical sensor(130) includes a light emitting part(132) and a light receiving part(134) transmitting and receiving light in a direction parallel with an inspection plane of an inspection object at a point separated from the inspection plane of the inspection object at a predetermined gap. A driving unit transfers the optical sensor to the inspection object in a direction parallel with the inspection plane of the inspection object and in direction of crossing with emitting direction of the optical sensor. |
