| 摘要 |
An apparatus and a method for inspecting an LCD(Liquid Crystal Display) are provided to reduce inspection time, inspection equipment installation cost and space by simultaneously performing MPS(Mass Production System) inspection and pattern inspection. A TFT(Thin Film Transistor) array panel(100) is mounted on a stage. An inspection apparatus having a CCD(Charge Coupled Device) camera(120a,120b) and a modulator(110) is aligned above the stage on which the TFT array panel is mounted. VIOS(Voltage Image System) inspection is performed on the TFT array panel using the modulator. The CCD camera captures an image of the portion of the TFT array panel, inspected by the modulator. The VIOS inspected by the modulator is mapped to the image captured by the CCD camera. When a defect is detected from the mapping operation, an image around the coordinates where the defect is detected is captured and stored. |
